Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

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Basic Information
Model NO.
CY-MSP300S-3RF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Dia. 185mm
Heating Temp.
Max 500℃
Rotate Speed
1-20rpm Adjustable
Chamber
Stainless Steel
Capacity
100 pieces/Month
Vacuum Plating Magnetron Sputtering PVD Systems
Magnetron Sputtering Coater introduction:
Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with three 300W RF power supply. The RF power supply can be used for the preparation of non-metal. The three targets can meet the needs of multi-layer or multiple coatings. If customers have other coating needs, DC power supply and pulse power supply can be customized. Various types of power supply are available from 300W to 1000W in various specifications.
The coating machine is equipped with two-channel high-precision mass flowmeter. If you have other requirements, you can customize the gas path of up to four-channel mass flowmeters to meet the complex gas environment construction requirements. The instrument is equipped with advanced turbomolecular pump sets, the ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase. Molecular pump gas path is controlled by multiple solenoid valves, you can open the chamber to take out the sample without shutting down the pump, greatly improving your work efficiency.
Magnetron Sputtering Coater Application
This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the three-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.
Technical Parameters
Sample stage Size φ185mm Temp Accuracy ±1ºC
Heating Temp Max 500ºC Rotate speed 1-20rpm adjustable
Target head Quantity 2"×3 (1",2" optional) Water chiller 10L/min circulating
Cooling mode Water cooling
Vacuum chamber Chamber size φ300mm×300mm Watch window φ100mm
Material Stainless steel Opening Top cover open
Mass flowmeter 2 channels; measuring range 100sccm (customizable)
Vacuum system Molecular pump CY-600 Ultimate vacuum 1.0E-5Pa
Backing pump Rotary vane pump Measurement Compound vacuum gauge
Pumping rate Molecular pump: 600L/S; Rotary vane pump: 1.1L/S; To 1.0E-3Pa in 20 mins
Voltage AC 220V 50/60Hz
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Detailed Photos
Vacuum Plating Thin Film Magnetron Sputtering PVD
Other Magnetron Sputtering Systems
Sputtering Coater 1 Sputtering Coater 2 Production Facility
Factory Overview Quality Certificate
Frequently Asked Questions
Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high quality and optimal pricing through mature technical experience.
What is your after-sales service system?
The product warranty period is 12 months with lifetime maintenance. Our professional pre-sales and after-sales departments respond within 24 hours to resolve technical issues.
How long is the delivery time for customized instruments?
Stock items take 5-10 days. For customized instruments, it usually takes 30-60 days depending on the specific technical requirements.
How do you handle different power supply standards?
We provide transformers and plugs compatible with your local requirements and the power standards of different countries.
What are the available payment methods?
We accept T/T, L/C, D/P, and other standard payment methods, including Trade Guarantees for secure transactions.
What is the packaging and shipping method?
Goods are packed in standard export fumigation-sign wooden boxes. We offer express, air, and sea shipping based on customer requirements to find the most suitable route.

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