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| Customization: | Available |
|---|---|
| After-sales Service: | Engineers Can Be Sent to The Worksite |
| Warranty: | 1 Year |
| Model | ARC Series |
| Vacuum Chamber | SUS304, φ600mm-1200×600-1200mm (H) |
| Substrate Dome Size | Customized to client needs |
| Rotation Speed | 10 rpm to 50 rpm (Variable) |
| Arc Evaporation Source | 2 to 16 sets |
| Vacuum System | Roughing Pump, Diffusion/Turbo Molecular Pump + Mechanical pumps |
| Ultimate Pressure | 5.0×10-4 Pa or lower |
| Pump Down Rate | 25 minutes (Atm. to 5.0×10-3 Pa) |
| Substrate Heater | Up to 550°C (max) |
| Layout Dimensions | 5000mm (W)×6500mm (D)×3500mm (H) approx. |
| Power Requirements | 3-phase, 380V, 50/60Hz, 100-180kVA |
| Cooling Water Flow | 140L/min or greater |
| Compressed Air | 0.5MPa or higher |
| Gross Weight | 8500kg approx. |
Daher Orthopedic Implants